Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5684301 | Monocrystalline test structures, and use for calibrating instruments | Michael W. Cresswell, R. N. Ghoshtagore, Richard A. Allen, Jeffry J. Sniegowski | 1997-11-04 |
| 5617340 | Method and reference standards for measuring overlay in multilayer structures, and for calibrating imaging equipment as used in semiconductor manufacturing | Michael W. Cresswell, Richard A. Allen, Joseph J. Kopanski | 1997-04-01 |
| 5602492 | Electrical test structure and method for measuring the relative locations of conducting features on an insulating substrate | Michael W. Cresswell, Richard A. Allen, E. Clayton Teague, William B. Penzes | 1997-02-11 |