Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5667592 | Process chamber sleeve with ring seals for isolating individual process modules in a common cluster | Charles A. Boitnott, James W. Caughran | 1997-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5667592 | Process chamber sleeve with ring seals for isolating individual process modules in a common cluster | Charles A. Boitnott, James W. Caughran | 1997-09-16 |