Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5667592 | Process chamber sleeve with ring seals for isolating individual process modules in a common cluster | Charles A. Boitnott, Steve Egbert | 1997-09-16 |
| 5662143 | Modular gas box system | — | 1997-09-02 |