Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5674646 | Mask producing method | Toshiaki Kawabata, Seiichiro Yamaguchi, Masao Taguchi, Kazuhiko Sumi, Yuichiro Yanagishita | 1997-10-07 |
| 5637424 | Fine pattern lithography with positive use of interference | Tamae Haruki | 1997-06-10 |
| 5624791 | Pattern forming method using mask | Toshiaki Kawabata, Seiichiro Yamaguchi, Masao Taguchi, Kazuhiko Sumi, Yuichiro Yanagishita | 1997-04-29 |
| 5607821 | Optical exposure method | Tamae Haruki, Masao Taguchi, Hiroyuki Tanaka, Satoru Asai, Isamu Hanyu | 1997-03-04 |