Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643046 | Polishing method and apparatus for detecting a polishing end point of a semiconductor wafer | Naoto Miyashita, Tatsuo Akiyama | 1997-07-01 |
| 5605488 | Polishing apparatus of semiconductor wafer | Hiroyuki Ohashi, Naoto Miyashita, Tetsuya Tsukihara | 1997-02-25 |