Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663653 | Wafer probe station for low-current measurements | Warren K. Harwood, Paul A. Tervo, Kenneth R. Smith, Richard H. Warner | 1997-09-02 |
| 5610529 | Probe station having conductive coating added to thermal chuck insulator | — | 1997-03-11 |