Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5591494 | Deposition of silicon nitrides by plasma-enhanced chemical vapor deposition | Atsushi Tabata, Naoaki Kobayashi | 1997-01-07 |
TS
Tatsuya Sato
Overall (1997): #71,015 of 185,788Top 40%
1
Patents 1997