Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5591494 | Deposition of silicon nitrides by plasma-enhanced chemical vapor deposition | Tatsuya Sato, Atsushi Tabata | 1997-01-07 |
NK
Naoaki Kobayashi
Overall (1997): #99,902 of 185,788Top 55%
1
Patents 1997