Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5664925 | Batchloader for load lock | Michael W. Pippins, Mitchell Drew | 1997-09-09 |
| 5613821 | Cluster tool batchloader of substrate carrier | Michael W. Pippins, Mitchell Drew | 1997-03-25 |
| 5609459 | Door drive mechanisms for substrate carrier and load lock | — | 1997-03-11 |
| 5607276 | Batchloader for substrate carrier on load lock | Michael W. Pippins, Mitchell Drew | 1997-03-04 |