Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5664925 | Batchloader for load lock | Richard S. Muka, Michael W. Pippins | 1997-09-09 |
| 5613821 | Cluster tool batchloader of substrate carrier | Richard S. Muka, Michael W. Pippins | 1997-03-25 |
| 5607276 | Batchloader for substrate carrier on load lock | Richard S. Muka, Michael W. Pippins | 1997-03-04 |