Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5703375 | Method and apparatus for ion beam neutralization | Jiong Chen | 1997-12-30 |
| 5691537 | Method and apparatus for ion beam transport | John Chen, Thomas N. Horsky, William E. Reynolds | 1997-11-25 |
| 5661308 | Method and apparatus for ion formation in an ion implanter | Michasel Cristoforo | 1997-08-26 |