Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5646734 | Method and apparatus for independently measuring the thickness and index of refraction of films using low coherence reflectometry | Wayne V. Sorin | 1997-07-08 |
| 5633712 | Method and apparatus for determining the thickness and index of refraction of a film using low coherence reflectometry and a reference surfaces | Wayne V. Sorin, Brian L. Heffner | 1997-05-27 |
| 5610716 | Method and apparatus for measuring film thickness utilizing the slope of the phase of the Fourier transform of an autocorrelator signal | Wayne V. Sorin, Brian L. Heffner | 1997-03-11 |