Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5693561 | Method of integrated circuit fabrication including a step of depositing tungsten | Sailesh Mansinh Merchant, Ronald J. Schutz | 1997-12-02 |
| 5643838 | Low temperature deposition of silicon oxides for device fabrication | Robert E. Dean, Pang Dow Foo, Earl R. Lory | 1997-07-01 |