Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5654903 | Method and apparatus for real time monitoring of wafer attributes in a plasma etch process | Dale E. Ibbotson, Tseng-Chung Lee | 1997-08-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5654903 | Method and apparatus for real time monitoring of wafer attributes in a plasma etch process | Dale E. Ibbotson, Tseng-Chung Lee | 1997-08-05 |