Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5653894 | Active neural network determination of endpoint in a plasma etch process | Tseng-Chung Lee, Helen L. Maynard, Edward A. Rietman | 1997-08-05 |
| 5654903 | Method and apparatus for real time monitoring of wafer attributes in a plasma etch process | Edward A. Reitman, Tseng-Chung Lee | 1997-08-05 |