Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5691110 | Process for controlled deprotection of polymers and a process for fabricating a device utilizing partially deprotected resist polymers | Michael Philip Bohrer | 1997-11-25 |
| 5688634 | Energy sensitive resist material and process for device fabrication using the resist material | Anthony E. Novembre | 1997-11-18 |