Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688634 | Energy sensitive resist material and process for device fabrication using the resist material | David Mixon | 1997-11-18 |
| 5656182 | Process for fabricating a device in which the process is controlled by near-field imaging latent features introduced into energy sensitive resist materials | Herschel M. Marchman, Jay Trautman | 1997-08-12 |