Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688358 | R.F. plasma reactor with larger-than-wafer pedestal conductor | Yoichiro Tanaka, Barney M. Cohen | 1997-11-18 |
MT
Megumi Taoka
Overall (1997): #183,626 of 185,788Top 100%
1
Patents 1997