Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688358 | R.F. plasma reactor with larger-than-wafer pedestal conductor | Yoichiro Tanaka, Megumi Taoka | 1997-11-18 |
| 5685941 | Inductively coupled plasma reactor with top electrode for enhancing plasma ignition | John C. Forster, Bradley O. Stimson, George Arthur Proulx | 1997-11-11 |