Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695568 | Chemical vapor deposition chamber | Ashok Sinha, Mei Chang, Ilya Perlov, Karl A. Littau, Lawrence Chung-Lai Lei | 1997-12-09 |
| 5688331 | Resistance heated stem mounted aluminum susceptor assembly | Michio Aruga, Atsunobu Ohkura, Akihiko Saito, Kenji Suzuki, Kenichi Taguchi +1 more | 1997-11-18 |