Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688331 | Resistance heated stem mounted aluminum susceptor assembly | Atsunobu Ohkura, Akihiko Saito, Kenji Suzuki, Kenichi Taguchi, Dale R. DuBois +1 more | 1997-11-18 |
| 5643633 | Uniform tungsten silicide films produced by chemical vapor depostiton | Susan G. Telford, Meng Chu Tseng, Moshe Eizenberg | 1997-07-01 |