Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702848 | Mask for optical lithography using phase shift masking and integrated circuit produced therefrom | — | 1997-12-30 |
| 5601954 | Attenuated phase shift mask comprising phase shifting layer with parabolically shaped sidewalls | Zoran Krivokapic | 1997-02-11 |