MA

Minoru Aoyagi

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
TL Tokyo Electron Yamanashi Limited: 1 patents #3 of 45Top 7%
📍 Hadano, JP: #26 of 91 inventorsTop 30%
Overall (1997): #105,234 of 185,788Top 60%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5611655 Vacuum process apparatus and vacuum processing method Yoshio Fukasawa, Shozo Hosoda, Tatsuya Nakagome, Takashi Tozawa, Koji Suzuki +2 more 1997-03-18