Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5611655 | Vacuum process apparatus and vacuum processing method | Yoshio Fukasawa, Tatsuya Nakagome, Takashi Tozawa, Koji Suzuki, Yasumasa Ishihara +2 more | 1997-03-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5611655 | Vacuum process apparatus and vacuum processing method | Yoshio Fukasawa, Tatsuya Nakagome, Takashi Tozawa, Koji Suzuki, Yasumasa Ishihara +2 more | 1997-03-18 |