Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5329161 | Molybdenum boride barrier layers between aluminum and silicon at contact points in semiconductor devices | John L. Cain, Chang-Ou Lee, Sigmund Koenigseder, Felix Fujishiro | 1994-07-12 |
| 5294571 | Rapid thermal oxidation of silicon in an ozone ambient | Felix Fujishiro, Chang-Ou Lee | 1994-03-15 |
| 5286518 | Integrated-circuit processing with progressive intermetal-dielectric deposition | John L. Cain, Felix Fujishiro, Chang-Ou Lee, Sigmund Koenigseder | 1994-02-15 |