Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5342476 | Reduction of polycide residues through helium backside pressure control during dry etching | — | 1994-08-30 |
| 5336366 | New dry etch technique | Chang-Ou Lee | 1994-08-09 |
| 5329161 | Molybdenum boride barrier layers between aluminum and silicon at contact points in semiconductor devices | Landon B. Vines, Chang-Ou Lee, Sigmund Koenigseder, Felix Fujishiro | 1994-07-12 |
| 5286518 | Integrated-circuit processing with progressive intermetal-dielectric deposition | Felix Fujishiro, Chang-Ou Lee, Sigmund Koenigseder, Landon B. Vines | 1994-02-15 |