Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370779 | ECR plasma process | Kazuo Ohba, Akira Ohba | 1994-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370779 | ECR plasma process | Kazuo Ohba, Akira Ohba | 1994-12-06 |