Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370779 | ECR plasma process | Yoshinori Shima, Akira Ohba | 1994-12-06 |
| 5322985 | Method for boring small holes in substrate material | Kaori Shima, Akira Ohba | 1994-06-21 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370779 | ECR plasma process | Yoshinori Shima, Akira Ohba | 1994-12-06 |
| 5322985 | Method for boring small holes in substrate material | Kaori Shima, Akira Ohba | 1994-06-21 |