Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5356261 | Wafer boat rotating apparatus | — | 1994-10-18 |
| 5334257 | Treatment object supporting device | Kazuo Terada | 1994-08-02 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5356261 | Wafer boat rotating apparatus | — | 1994-10-18 |
| 5334257 | Treatment object supporting device | Kazuo Terada | 1994-08-02 |