Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5334257 | Treatment object supporting device | Hironobu Nishi | 1994-08-02 |
| 5324540 | System and method for supporting and rotating substrates in a process chamber | — | 1994-06-28 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5334257 | Treatment object supporting device | Hironobu Nishi | 1994-08-02 |
| 5324540 | System and method for supporting and rotating substrates in a process chamber | — | 1994-06-28 |