Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5364488 | Coaxial plasma processing apparatus | Akira Uehara, Atsushi Matsushita | 1994-11-15 |
| 5344536 | Method of and apparatus for processing a workpiece in plasma | Kazuto Obuchi, Satoshi Oya, Akira Uehara, Kazutoshi Fujisawa, Kazuhisa Takao | 1994-09-06 |