Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5344536 | Method of and apparatus for processing a workpiece in plasma | Kazuto Obuchi, Mitsuaki Minato, Akira Uehara, Kazutoshi Fujisawa, Kazuhisa Takao | 1994-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5344536 | Method of and apparatus for processing a workpiece in plasma | Kazuto Obuchi, Mitsuaki Minato, Akira Uehara, Kazutoshi Fujisawa, Kazuhisa Takao | 1994-09-06 |