Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5316472 | Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus | Isao Siratani, Yutaka Simada, Hiroki Fukusima, Hirofumi Kitayama, Akimichi Yonekura +1 more | 1994-05-31 |