Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5316472 | Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus | Reiji Niino, Isao Siratani, Yutaka Simada, Hiroki Fukusima, Hirofumi Kitayama +1 more | 1994-05-31 |
| 5286523 | Method of processing substrates and substrate processing apparatus | Tetsuo Matsuda, Yuuichi Mikata | 1994-02-15 |