Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5311452 | Plasma processing apparatus using capacitance manometer and pressure control method thereof | Takashi Yokota | 1994-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5311452 | Plasma processing apparatus using capacitance manometer and pressure control method thereof | Takashi Yokota | 1994-05-10 |