TY

Takashi Yokota

TL Tokyo Electron Limited: 1 patents #46 of 210Top 25%
📍 Tokyo, CA: #66 of 141 inventorsTop 50%
Overall (1994): #61,748 of 165,921Top 40%
1
Patents 1994

Issued Patents 1994

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5311452 Plasma processing apparatus using capacitance manometer and pressure control method thereof Osamu Kamikanda 1994-05-10