Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374327 | Plasma processing method | Issei Imahashi, Chishio Koshimizu | 1994-12-20 |
| 5342472 | Plasma processing apparatus | Issei Imahashi | 1994-08-30 |
| 5314541 | Reduced pressure processing system and reduced pressure processing method | Masasi Saito, Teruo Iwata, Towl Ikeda, Hiroaki Saeki | 1994-05-24 |