Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374327 | Plasma processing method | Nobuo Ishii, Chishio Koshimizu | 1994-12-20 |
| 5372836 | Method of forming polycrystalling silicon film in process of manufacturing LCD | Kiichi Hama, Jiro Hata | 1994-12-13 |
| 5342472 | Plasma processing apparatus | Nobuo Ishii | 1994-08-30 |
| 5338362 | Apparatus for processing semiconductor wafer comprising continuously rotating wafer table and plural chamber compartments | — | 1994-08-16 |