Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370739 | Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD | Helen E. Rebenne, Rene E. LeBlanc, Carl Louis White, Rikhit Arora | 1994-12-06 |
| 5356476 | Semiconductor wafer processing method and apparatus with heat and gas flow control | Helen E. Rebenne, Rene E. LeBlanc, Carl Louis White, Rikhit Arora | 1994-10-18 |
| 5342652 | Method of nucleating tungsten on titanium nitride by CVD without silane | Damodaran Srinivas | 1994-08-30 |