Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370739 | Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD | Robert F. Foster, Helen E. Rebenne, Rene E. LeBlanc, Rikhit Arora | 1994-12-06 |
| 5356476 | Semiconductor wafer processing method and apparatus with heat and gas flow control | Robert F. Foster, Helen E. Rebenne, Rene E. LeBlanc, Rikhit Arora | 1994-10-18 |