Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376215 | Apparatus for production of extremely thin SOI film substrate | Yutaka Ohta, Masatake Katayama, Takao Abe | 1994-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376215 | Apparatus for production of extremely thin SOI film substrate | Yutaka Ohta, Masatake Katayama, Takao Abe | 1994-12-27 |