Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376215 | Apparatus for production of extremely thin SOI film substrate | Yutaka Ohta, Masatake Nakano, Takao Abe | 1994-12-27 |
| 5336634 | Dielectrically isolated substrate and a process for producing the same | Makoto Sato, Yutaka Ohta, Mitsuru Sugita, Konomu Ohki | 1994-08-09 |