SI

Shinji Imatoh

SL Semiconductor Energy Laboratory: 1 patents #22 of 53Top 45%
Overall (1994): #41,898 of 165,921Top 30%
1
Patents 1994

Issued Patents 1994

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5288684 Photochemical vapor phase reaction apparatus and method of causing a photochemical vapor phase reaction Shunpei Yamazaki, Shigenori Hayashi 1994-02-22