Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5369336 | Plasma generating device | Hideomi Koinuma, Shunpei Yamazaki | 1994-11-29 |
| 5304407 | Method for depositing a film | Shunpei Yamazaki | 1994-04-19 |
| 5288684 | Photochemical vapor phase reaction apparatus and method of causing a photochemical vapor phase reaction | Shunpei Yamazaki, Shinji Imatoh | 1994-02-22 |