SH

Shigenori Hayashi

SL Semiconductor Energy Laboratory: 3 patents #7 of 53Top 15%
Overall (1994): #8,830 of 165,921Top 6%
3
Patents 1994

Issued Patents 1994

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
5369336 Plasma generating device Hideomi Koinuma, Shunpei Yamazaki 1994-11-29
5304407 Method for depositing a film Shunpei Yamazaki 1994-04-19
5288684 Photochemical vapor phase reaction apparatus and method of causing a photochemical vapor phase reaction Shunpei Yamazaki, Shinji Imatoh 1994-02-22