Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5312772 | Method of manufacturing interconnect metallization comprising metal nitride and silicide | Kenji Yokoyama, Juri Kato | 1994-05-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5312772 | Method of manufacturing interconnect metallization comprising metal nitride and silicide | Kenji Yokoyama, Juri Kato | 1994-05-17 |