Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5312772 | Method of manufacturing interconnect metallization comprising metal nitride and silicide | Kenji Yokoyama, Masashi Ogita | 1994-05-17 |
| 5298860 | Method of analyzing metal impurities in surface oxide film of semiconductor substrate | — | 1994-03-29 |