Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5372916 | X-ray exposure method with an X-ray mask comprising phase shifter sidewalls | Taro Ogawa, Kozo Mochiji, Seiichi Murayama, Hiroaki Oizumi, Takashi Soga +1 more | 1994-12-13 |