Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5350919 | Quantitative analyzing method by a secondary ion mass spectrometric method and a secondary ion mass spectrometer | Takashi Hirano, Takeshige Tanigaki | 1994-09-27 |
| 5326980 | Ion implanter with plural surface potential sensors | Kazuhiro Tajima | 1994-07-05 |