Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5321495 | Optical detecting system for determining particle position on a substrate | Takashi Hagiwara, Dainichiro Kinoshita | 1994-06-14 |
| 5311275 | Apparatus and method for detecting particles on a substrate | Masaaki Ishihara, Takashi Hagiwara | 1994-05-10 |