Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5337140 | Optical detecting system wtih self-correction | Takashi Hagiwara, Toyoki Kanzaki | 1994-08-09 |
| 5321495 | Optical detecting system for determining particle position on a substrate | Takashi Hagiwara, Minoru Taniguchi | 1994-06-14 |